HYDROCARBON FORMATION DUE TO HYDROGEN-ION IMPACT ON AMORPHOUS HYDROGENATED CARBON-FILMS

被引:9
|
作者
DAVIS, JW [1 ]
HAASZ, AA [1 ]
机构
[1] UNIV TORONTO,CTR NUCL ENGN,DOWNSVIEW M3H 5T6,ONTARIO,CANADA
关键词
D O I
10.1016/0022-3115(87)90537-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:349 / 351
页数:3
相关论文
共 50 条
  • [31] AMBIGUOUS DOPING EFFECTS IN AMORPHOUS HYDROGENATED CARBON-FILMS PREPARED BY PACVD
    THIELE, JU
    RUBARTH, B
    HAMMER, P
    HELMBOLD, A
    KESSLER, B
    ROHWER, K
    MEISSNER, D
    DIAMOND AND RELATED MATERIALS, 1994, 3 (08) : 1103 - 1106
  • [32] ELECTRON-SPIN RESONANCE STUDY OF AMORPHOUS HYDROGENATED CARBON-FILMS
    MILLER, DJ
    MCKENZIE, DR
    THIN SOLID FILMS, 1983, 108 (03) : 257 - 264
  • [33] ON THE TEMPERATURE-DEPENDENCE OF THE DEPOSITION RATE OF AMORPHOUS, HYDROGENATED CARBON-FILMS
    KERSTEN, H
    KROESEN, GMW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (01): : 38 - 42
  • [34] GAS-ADSORPTION STUDIES OF SPUTTERED AMORPHOUS HYDROGENATED CARBON-FILMS
    PIGRAM, PJ
    LAMB, RN
    COLLINS, RE
    PAILTHORPE, BA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (05): : 2718 - 2724
  • [35] INVESTIGATION ON PHYSICAL-PROPERTIES AND STRUCTURE OF AMORPHOUS HYDROGENATED CARBON-FILMS
    DEMICHELIS, F
    FANCIULLI, M
    KANIADAKIS, G
    TAGLIAFERRO, A
    TRESSO, E
    RAVA, P
    GIAMELLO, E
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 101 (2-3) : 179 - 186
  • [36] HYDROGEN LOSS FROM LASER-ANNEALED AMORPHOUS HYDROGENATED CARBON-FILMS STUDIED BY SECONDARY-ION MASS-SPECTROMETRY
    ARMEYEV, VY
    LOUBNIN, EN
    RALCHENKO, VG
    STRELNITSKY, VE
    APPLIED PHYSICS LETTERS, 1991, 58 (24) : 2758 - 2760
  • [37] PREPARATION OF HARD CARBON-FILMS BY CO2-LASER PVD WITH SIMULTANEOUS HYDROGEN-ION SUPPLY
    MINETA, SE
    OGURA, S
    YASUNAGA, N
    SHIBATA, H
    YAMADA, A
    KOKAJI, Y
    OBARA, A
    BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING, 1990, 24 (03): : 214 - 216
  • [38] MECHANISMS OF THE DEPOSITION OF HYDROGENATED CARBON-FILMS
    MOLLER, W
    FUKAREK, W
    LANGE, K
    VONKEUDELL, A
    JACOB, W
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (4B): : 2163 - 2171
  • [39] ELECTRON-DIFFRACTION EVIDENCE FOR THREEFOLD COORDINATION IN AMORPHOUS HYDROGENATED CARBON-FILMS
    MCKENZIE, DR
    BOTTEN, LC
    MCPHEDRAN, RC
    PHYSICAL REVIEW LETTERS, 1983, 51 (04) : 280 - 283
  • [40] ELECTRICAL-CONDUCTIVITY OF AS-PREPARED AND ANNEALED AMORPHOUS HYDROGENATED CARBON-FILMS
    REYESMENA, A
    GONZALEZHERNANDEZ, J
    ASOMOZA, R
    CHAO, BS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03): : 1509 - 1513