共 50 条
- [1] ION-IMPLANTATION .2. ION-IMPLANTATION IN NONELECTRONIC MATERIALS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 24-5 : 506 - 511
- [5] THE MODIFICATION OF MATERIALS BY ION-IMPLANTATION PHYSICS IN TECHNOLOGY, 1983, 14 (05): : 225 - 232
- [8] A REVIEW OF SILICON-ON-INSULATOR FORMATION BY OXYGEN ION-IMPLANTATION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 597 - 598
- [9] ION-IMPLANTATION INTO HEATED SILICA SUBSTRATES NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 93 (04): : 433 - 438
- [10] LUMINESCENCE DURING ION-IMPLANTATION OF SILICA NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 781 - 786