DEVELOPMENT METHODS FOR SUB-MICRON OPTICAL LITHOGRAPHY

被引：5
|
作者：
ENDO, M
SASAGO, M
NAKAGAWA, H
UENO, A
NOMURA, N
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 10期
关键词：
D O I：
10.1143/JJAP.28.2035
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：2035 / 2037
页数：3
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