DEVELOPMENT METHODS FOR SUB-MICRON OPTICAL LITHOGRAPHY

被引：5

|

作者：

ENDO, M

SASAGO, M

NAKAGAWA, H

UENO, A

NOMURA, N

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 10期

关键词：

D O I：

10.1143/JJAP.28.2035

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2035 / 2037

页数：3

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