STRESS RELATED ANISOTROPY STUDIES IN DC-MAGNETRON SPUTTERED TBCO AND TBFE FILMS

被引：24
|
作者：
CHENG, SCN
KRYDER, MH
MATHUR, MCA
机构：
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1989年 / 25卷 / 05期
关键词：
D O I：
10.1109/20.42509
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：4018 / 4020
页数：3
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