Growth and characterization of DC magnetron sputtered GZO:Ti films

被引：0
|
作者：
Guo, Meixia [1 ]
Li, Jie [1 ]
机构：
[1] School of Science, Shandong University of Technology, Zibo 255049, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2012年 / 32卷 / 04期
关键词：
11;
D O I：
10.3969/j.issn.1672-7126.2012.04.11
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：324 / 327
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