AUTOMATED APPARATUS FOR MEASURING THE MASS OF FILMS DEPOSITED IN A GLOW-DISCHARGE

被引：0
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作者：
SAKSONSKII, VA
SHCHUROV, AN
POTAPOV, VK
DRUZHININ, AA
GERCHIKOV, MV
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INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1984年 / 27卷 / 02期
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T [工业技术];
学科分类号：
08 ;
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页码：497 / 501
页数：5
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