AUTOMATED APPARATUS FOR MEASURING THE MASS OF FILMS DEPOSITED IN A GLOW-DISCHARGE

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作者：

SAKSONSKII, VA

SHCHUROV, AN

POTAPOV, VK

DRUZHININ, AA

GERCHIKOV, MV

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INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1984年 / 27卷 / 02期

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T [工业技术];

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08 ;

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页码：497 / 501

页数：5

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