STRUCTURE OF FILMS PREPARED BY GLOW-DISCHARGE DECOMPOSITION OF HEXAFLUORODISILANE

被引：0
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作者：
KUMEDA, M
TAKAHASHI, Y
SHIMIZU, T
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 12期
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D O I：
10.1143/JJAP.25.1950
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1950 / 1951
页数：2
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