TEM STUDY OF INTERDIFFUSION AND INTERFACES IN MO/PD/SI THIN-FILMS

被引：4
|
作者：
SINGH, RN
KOCH, EF
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 06期
关键词：
D O I：
10.1149/1.2108817
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1191 / 1195
页数：5
相关论文
共 50 条
  • [21] THIN-FILMS AND INTERFACES - FOREWORD
    KLEIN, J
    ISRAEL JOURNAL OF CHEMISTRY, 1995, 35 (01) : 1 - 1
  • [22] ANALYSIS OF THIN-FILMS AND INTERFACES
    POATE, JM
    TU, KN
    PHYSICS TODAY, 1980, 33 (05) : 34 - 38
  • [23] THERMOMECHANICS OF THIN-FILMS AND INTERFACES
    LAMBROPOULOS, JC
    JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (09) : 895 - 901
  • [24] TEM STUDY OF BLOCK-COPOLYMERS CONFINED IN THIN-FILMS
    GANTER, M
    KRESSLER, J
    HECKMANN, W
    HIGASHIDE, N
    INOUE, T
    POLYMER, 1995, 36 (21) : 4167 - 4171
  • [25] INTERDIFFUSION AND STRUCTURAL RELAXATION IN MO/SI MULTILAYER FILMS
    NAKAJIMA, H
    FUJIMORI, H
    KOIWA, M
    JOURNAL OF APPLIED PHYSICS, 1988, 63 (04) : 1046 - 1051
  • [26] PHYSICOCHEMICAL INTERACTION OF PD THIN-FILMS AND ITS ALLOYS WITH SI SUBSTRATES
    DOSTANKO, AP
    SHATALOV, VV
    KOVAL, AG
    MELNIKOV, VN
    CHISTYAKOV, YD
    BARANOV, VV
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII RADIOELEKTRONIKA, 1980, 23 (12): : 47 - 53
  • [27] THERMAL-STABILITY OF THIN-FILMS OF PD2SI ON SI(111)
    OUSTRY, A
    BERTY, J
    DAVID, MJ
    CAUMONT, M
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1985, 40 (226): : 205 - 205
  • [28] Surface roughness and interface diffusion studies on thin Mo and W films and Mo/Si and W/Si interfaces
    Bhattacharyya, D
    Poswal, AK
    Senthilkumar, M
    Satyam, PV
    Balamurugan, AK
    Tyagi, AK
    Das, NC
    APPLIED SURFACE SCIENCE, 2003, 214 (1-4) : 259 - 271
  • [29] INTERDIFFUSION AND GRAIN ISOLATION IN CO/CR THIN-FILMS
    FENG, YC
    LAUGHLIN, DE
    LAMBETH, DN
    IEEE TRANSACTIONS ON MAGNETICS, 1994, 30 (06) : 3948 - 3950
  • [30] PHASE SUPPRESSION IN THE TRANSIENT STAGES OF INTERDIFFUSION IN THIN-FILMS
    WILLIAMS, DS
    RAPP, RA
    HIRTH, JP
    THIN SOLID FILMS, 1986, 142 (01) : 47 - 64
12345