PROPERTIES OF THERMALLY GROWN SILICON NITRIDE FILMS

被引：4
|
作者：
OKADA, K
SAKANE, H
SUGIOKA, Y
机构：
来源：
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 1967年 / 23卷 / 03期
关键词：
D O I：
10.1143/JPSJ.23.655
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：655 / &
相关论文
共 50 条
  • [31] FUSED GLASS PENETRATION INTO THERMALLY GROWN SILICON DIOXIDE FILMS
    PLISKIN, WA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (08) : C185 - &
  • [32] A nanoindentation study of thermally-grown-oxide films on silicon
    Helvaci, F
    Cho, JY
    Fundamentals of Nanoindentation and Nanotribology III, 2005, 841 : 375 - 380
  • [33] EFFECT OF A SILICON-BORON PHASE ON THERMALLY GROWN SILICON OXIDE FILMS
    FITZGIBBONS, WA
    KLOFFENSTEIN, T
    BUSEN, KM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (02) : 272 - +
  • [34] EFFECT OF A SILICON-BORON PHASE ON THERMALLY GROWN SILICON OXIDE FILMS
    FITZGIBB.WA
    KLOFFENS.T
    BUSEN, KM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (07) : C250 - &
  • [35] IONIC CURRENT STUDY IN THERMALLY GROWN SILICON DIOXIDE FILMS ON POLYCRYSTALLINE SILICON
    SALMAN, EG
    PEROV, GV
    VERTOPRAKHOV, VN
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1987, 99 (02): : 537 - 542
  • [36] Determination of the electrical properties of ultrathin silicon-based dielectric films:: thermally grown SiNx
    Pic, N
    Glachant, A
    Nitsche, S
    Hoarau, JY
    Goguenheim, D
    Vuillaume, D
    Sibai, A
    Chaneliere, C
    SOLID-STATE ELECTRONICS, 2001, 45 (08) : 1265 - 1270
  • [37] MICROSTRUCTURAL PROPERTIES OF THERMALLY GROWN SILICON DIOXIDE LAYERS
    BALK, P
    ALIOTTA, CF
    GREGOR, LV
    TRANSACTIONS OF THE METALLURGICAL SOCIETY OF AIME, 1965, 233 (03): : 563 - +
  • [38] ANTIREFLECTION PROPERTIES OF THERMALLY GROWN SILICON OXIDE ON SILICON OPTICAL ELEMENTS
    MILER, M
    INFRARED PHYSICS, 1967, 7 (02): : 117 - &
  • [39] Quantum confinement effect of silicon nanocrystals in situ grown in silicon nitride films
    Kim, TY
    Park, NM
    Kim, KH
    Sung, GY
    Ok, YW
    Seong, TY
    Choi, CJ
    APPLIED PHYSICS LETTERS, 2004, 85 (22) : 5355 - 5357
  • [40] Quantum confinement effect of silicon namocrystals in situ grown in silicon nitride films
    Kim, TY
    Park, NM
    Kim, KH
    Ok, YW
    Seong, TY
    Choi, CJ
    Sung, GY
    NEW MATERIALS FOR MICROPHOTONICS, 2004, 817 : 121 - 126
12345