Precursors for CVD growth of nanocrystalline diamond

被引：0
|
作者：
T. Soga
T. Sharda
T. Jimbo
机构：
[1] Nagoya Institute of Technology,Department of Environmental Technology and Urban Planning
[2] Seki Technotron Corp.,Research and Development
来源：
Physics of the Solid State | 2004年 / 46卷
关键词：
Silicon; Microwave; Raman Spectroscopy; Chemical Vapor Deposition; Silicon Substrate;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Various routes to grow nanocrystalline diamond films by the chemical vapor deposition technique are reviewed. Among the various routes, NCD films deposited on mirror-polished silicon substrates by biased enhanced growth by microwave plasma chemical vapor deposition are described in detail. The qualitative concentration of NCD was assessed by Raman spectroscopy and x-ray diffraction patterns of the films. The hardness of the films approaches that of natural diamond at optimized conditions while still having a low amount of stress (<1 GPa).
引用
收藏
页码：720 / 725
页数：5
相关论文
共 50 条
  • [31] Application of CVD nanocrystalline diamond films to cemented carbide drills
    Meng, X. M.
    Tang, W. Z.
    Hei, L. F.
    Li, C. M.
    Askari, S. J.
    Chen, G. C.
    Lu, F. X.
    INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2008, 26 (05): : 485 - 490
  • [32] Research of microstructural characteristics on nanocrystalline diamond by microwave plasma CVD
    Hung, Jing-Ming
    Lin, Li-Hsiang
    Shih, Yung-Hsun
    Liu, Chung-Ming
    Cheng, Hsin-Chung
    Ou, Keng-Liang
    APPLIED SURFACE SCIENCE, 2011, 257 (13) : 5508 - 5512
  • [33] The fabrication of nanocrystalline diamond films using hot filament CVD
    Wang, T
    Xin, HW
    Zhang, ZM
    Dai, YB
    Shen, HS
    DIAMOND AND RELATED MATERIALS, 2004, 13 (01) : 6 - 13
  • [34] Substitutional phosphorus incorporation in nanocrystalline CVD diamond thin films
    Janssen, Wiebke
    Turner, Stuart
    Sakr, Georges
    Jomard, Franois
    Barjon, Julien
    Degutis, Giedrius
    Lu, Ying-Gang
    D'Haen, Jan
    Hardy, An
    Van Bael, Marlies
    Verbeeck, Johan
    Van Tendeloo, Gustaaf
    Haenen, Ken
    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2014, 8 (08): : 705 - 709
  • [35] Growth of nanocrystalline diamond films on Co-cemented tungsten carbide substrates by hot filament CVD
    Sun, FH
    Zhang, ZM
    Shen, HS
    Chen, M
    ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY, 2004, 471-472 : 52 - 58
  • [36] MECHANISMS OF NUCLEATION AND GROWTH OF CVD DIAMOND
    FRENKLACH, M
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1990, 200 : 114 - COLL
  • [37] CVD diamond films: nucleation and growth
    Lee, ST
    Lin, ZD
    Jiang, X
    MATERIALS SCIENCE & ENGINEERING R-REPORTS, 1999, 25 (04): : 123 - 154
  • [38] Chemical nucleation for CVD diamond growth
    Giraud, A
    Jenny, T
    Leroy, E
    Küttel, OM
    Schlapbach, L
    Vanelle, P
    Giraud, L
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2001, 123 (10) : 2271 - 2274
  • [39] The CVD growth of micro crystals of diamond
    Chung, HK
    Sung, JC
    DIAMOND AND RELATED MATERIALS, 2001, 10 (9-10) : 1584 - 1587
  • [40] MECHANISTIC STUDIES OF CVD DIAMOND GROWTH
    HARRIS, SJ
    WEINER, AM
    CARBON, 1990, 28 (06) : 806 - 806
12345