Precursors for CVD growth of nanocrystalline diamond
被引:0
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作者:
T. Soga
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机构:Nagoya Institute of Technology,Department of Environmental Technology and Urban Planning
T. Soga
T. Sharda
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机构:Nagoya Institute of Technology,Department of Environmental Technology and Urban Planning
T. Sharda
T. Jimbo
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机构:Nagoya Institute of Technology,Department of Environmental Technology and Urban Planning
T. Jimbo
机构:
[1] Nagoya Institute of Technology,Department of Environmental Technology and Urban Planning
[2] Seki Technotron Corp.,Research and Development
来源:
Physics of the Solid State
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2004年
/
46卷
关键词:
Silicon;
Microwave;
Raman Spectroscopy;
Chemical Vapor Deposition;
Silicon Substrate;
D O I:
暂无
中图分类号:
学科分类号:
摘要:
Various routes to grow nanocrystalline diamond films by the chemical vapor deposition technique are reviewed. Among the various routes, NCD films deposited on mirror-polished silicon substrates by biased enhanced growth by microwave plasma chemical vapor deposition are described in detail. The qualitative concentration of NCD was assessed by Raman spectroscopy and x-ray diffraction patterns of the films. The hardness of the films approaches that of natural diamond at optimized conditions while still having a low amount of stress (<1 GPa).
机构:
Indira Gandhi Ctr Atom Res, Div Mat Sci, Kalpakkam 603102, Tamil Nadu, IndiaIndira Gandhi Ctr Atom Res, Div Mat Sci, Kalpakkam 603102, Tamil Nadu, India
Arora, AK
Ravindran, TR
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机构:Indira Gandhi Ctr Atom Res, Div Mat Sci, Kalpakkam 603102, Tamil Nadu, India
Ravindran, TR
Reddy, GLN
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机构:Indira Gandhi Ctr Atom Res, Div Mat Sci, Kalpakkam 603102, Tamil Nadu, India
Reddy, GLN
Sikder, AK
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机构:Indira Gandhi Ctr Atom Res, Div Mat Sci, Kalpakkam 603102, Tamil Nadu, India
Sikder, AK
Misra, DS
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机构:Indira Gandhi Ctr Atom Res, Div Mat Sci, Kalpakkam 603102, Tamil Nadu, India
机构:
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R ChinaUniv Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
Zuo, Yong-gang
Li, Jia-jun
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机构:
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R ChinaUniv Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
Li, Jia-jun
Bai, Yang
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机构:
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R ChinaUniv Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
Bai, Yang
Liu, Hao
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机构:
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R ChinaUniv Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
Liu, Hao
Yuan, He-wei
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机构:
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R ChinaUniv Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
Yuan, He-wei
Chen, Guang-chao
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机构:
Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R ChinaUniv Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China