Application of micromachining technology to optical devices and systems

被引：0
|
作者：
Fujita, H [1 ]
机构：
[1] UNIV TOKYO, INST IND SCI, MINATO KU, TOKYO 106, JAPAN
来源：
MICROELECTRONIC STRUCTURES AND MEMS FOR OPTICAL PROCESSING II | 1996年 / 2881卷
关键词：
MEMS; micromachine; optics; microactuator; LIGA process; silicon;
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：2 / 11
页数：10
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