Application of micromachining technology to optical devices and systems

被引：0
|
作者：
Fujita, H [1 ]
机构：
[1] UNIV TOKYO, INST IND SCI, MINATO KU, TOKYO 106, JAPAN
来源：
MICROELECTRONIC STRUCTURES AND MEMS FOR OPTICAL PROCESSING II | 1996年 / 2881卷
关键词：
MEMS; micromachine; optics; microactuator; LIGA process; silicon;
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：2 / 11
页数：10
相关论文
共 50 条
  • [41] Status and trend of the optical devices for the future optical communications technology
    Tesauri, M
    DiMaio, G
    Ghiggino, P
    BROADBAND STRATEGIES AND TECHNOLOGIES FOR WIDE AREA AND LOCAL ACCESS NETWORKS, 1996, 2953 : 118 - 138
  • [42] Laser micromachining of high-aspect-rado metallic channels for the application to microthemial devices
    Oh, Kwang Hwan
    Lee, Min Kyu
    Jeong, Sungho
    KOREAN JOURNAL OF OPTICS AND PHOTONICS, 2006, 17 (05) : 437 - 446
  • [43] Laser micromachining of high-aspect-ratio metallic grooves for application to microthermal devices
    Oh, Kwang H.
    Lee, M. K.
    Jeong, S. H.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (10) : 1958 - 1966
  • [44] Polyimide microfluidic devices with integrated nanoporous filtration areas manufactured by micromachining and ion track technology
    Metz, S
    Trautmann, C
    Bertsch, A
    Renaud, P
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (03) : 324 - 331
  • [45] Photonics and application of dipyrrinates in the optical devices
    Aksenova, Iu
    Bashkirtsev, D.
    Prokopenko, A.
    Kuznetsova, R.
    Dudina, N.
    Berezin, M.
    3RD INTERNATIONAL SCHOOL AND CONFERENCE ON OPTOELECTRONICS, PHOTONICS, ENGINEERING AND NANOSTRUCTURES (SAINT PETERSBURG OPEN 2016), 2016, 741
  • [46] APPLICATION OF HETEROJUNCTION STRUCTURES TO OPTICAL DEVICES
    KRESSEL, H
    JOURNAL OF ELECTRONIC MATERIALS, 1975, 4 (05) : 1081 - 1141
  • [47] Polymer material for optical devices application
    Kassim, NM
    Mohammad, AB
    Supa'at, ASM
    Ibrahim, MH
    Gang, SY
    2004 RF and Microwave Conference, RFM 2004, Proceedings, 2004, : 277 - 280
  • [48] Micromachining technologies for miniaturized communication devices
    Nguyen, CTC
    MICROMACHINED DEVICES AND COMPONENTS IV, 1998, 3514 : 24 - 38
  • [49] Laser micromachining for manufacturing MEMS devices
    Gower, M
    MEMS COMPONENTS AND APPLICATIONS FOR INDUSTRY, AUTOMOBILES, AEROSPACE, AND COMMUNICATION, 2001, 4559 : 53 - 59
  • [50] An application of optical multicast technology
    Qiu Qi
    Shi Shuangjin
    Qiu Kun
    2006 INTERNATIONAL CONFERENCE ON COMMUNICATIONS, CIRCUITS AND SYSTEMS PROCEEDINGS, VOLS 1-4: VOL 1: SIGNAL PROCESSING, 2006, : 1869 - +
12345