Cobalt silicide formations and magnetic properties of laser ablated Co(Cr) thin films

被引:6
|
作者
Zeng, Fanhao [1 ]
Xiong, Xiang [1 ]
Huang, Baiyuan [1 ]
机构
[1] Cent S Univ, State Key Lab Powder Met, Powder Met Res Inst, Changsha 410083, Peoples R China
基金
中国博士后科学基金; 美国国家科学基金会;
关键词
Silicides; Magnetic properties; Vapor deposition; Electron microscopy; transmission; Magnetic application; EPITAXIAL COSI2 FORMATION; PHASE-FORMATION SEQUENCE; EFFECTIVE HEAT; GROWTH;
D O I
10.1016/j.intermet.2009.07.027
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The solid-phase reaction between Si(111) substrate and the Co(Cr) films produced by laser ablation at temperatures ranging from 400 degrees C to 600 degrees C, as well as their magnetic properties were investigated. It has been shown that the Co films consist of CoSi(111) phase during 500-600 degrees C and co-existed CoSi and COSi2 silicides at 600 degrees C by X-ray diffraction and transmission electron microscopy. However, the deposited CoCr22 films contain only CoSi phase with (111) preferential orientation at deposited temperature from 500 degrees C to 600 degrees C, suggesting that the Cr element may act as a diffusion barrier in the CoCr/Si system. The magnetic coercivity and squareness of the produced films decrease as the deposited temperature increases and it almost cannot be detected at 600 degrees C. Adding Cr element into the Co films can improve and adjust the magnetic properties. The theoretical explanations of preferential orientations of CoSi(111) and COSi2(200) have been given by comparing the arrangement of atoms on CoSi(111) and COSi2(200) with that on Si(111). (C) 2009 Elsevier Ltd. All rights reserved.
引用
收藏
页码:306 / 311
页数:6
相关论文
共 50 条
  • [41] Characterization of laser ablated silicon oxynitride thin films
    Institute of Microtechnology, P.O. Box 38-160, RO-72225 Bucharest, Romania
    不详
    J Alloys Compd, (309-312):
  • [42] Characterisation of laser ablated silicon oxynitride thin films
    Radoi, R
    Gherasim, C
    Dinescu, M
    JOURNAL OF ALLOYS AND COMPOUNDS, 1999, 286 (1-2) : 309 - 312
  • [43] Thermal stability of cobalt silicide thin films on Si(100)
    Chen, Bin-Shing
    Chen, Mao-Chieh
    Journal of Applied Physics, 1993, 74 (02):
  • [44] Structural, optical and dielectric properties of gadolinium incorporated laser ablated ZnO thin films
    Vinodkumar, R.
    Varghese, Jeena
    Varghese, Jiji
    Saji, S. K.
    Unnikrishnan, N. V.
    OPTIK, 2018, 174 : 274 - 281
  • [45] AC properties of laser ablated La-modified lead titanate thin films
    Venkateswarlu, P
    Laha, A
    Krupanidhi, SB
    THIN SOLID FILMS, 2005, 474 (1-2) : 1 - 9
  • [46] Microstructure and magnetic properties of Co(Cr)/Ti(Cr)/ZnO films prepared by laser ablation on Si substrates
    Zeng, Fanhao
    Xiong, Xiang
    Huang, Baiyun
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2010, 99 (02): : 459 - 463
  • [47] Magnetic and transport properties of Py/Cr/Co/Cr sputtered films
    Lo, C.K.
    Klik, I.
    Ho, C.H.
    Chang, C.J.
    Liou, Y.
    Yao, Y.D.
    IEEE Transactions on Magnetics, 1997, 33 (5 pt 2): : 3526 - 3528
  • [48] Magnetic and transport properties of Py/Cr/Co/Cr sputtered films
    Lo, CK
    Klik, I
    Ho, CH
    Chang, CJ
    Liou, Y
    Yao, YD
    IEEE TRANSACTIONS ON MAGNETICS, 1997, 33 (05) : 3526 - 3528
  • [49] Microstructure and magnetic properties of Co(Cr)/Ti(Cr)/ZnO films prepared by laser ablation on Si substrates
    Fanhao Zeng
    Xiang Xiong
    Baiyun Huang
    Applied Physics A, 2010, 99 : 459 - 463
  • [50] Optical, structural, and magnetic properties of cobalt nanostructure thin films
    Schmidt, D.
    Kjerstad, A. C.
    Hofmann, T.
    Skomski, R.
    Schubert, E.
    Schubert, M.
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (11)