The Influence of Annealing Treatment on Physics and Electrical Characteristics of Ba(Zr0.1Ti0.9)O3 Ferroelectric Films on ITO/glass Substrate

被引：0
|
作者：
Tzou, Wen-Cheng [1 ]
Cheng, Chien-Min [2 ]
Chen, Kai-Huang [3 ]
Yang, Hung-Chi [2 ]
Shen, Guan-Hung [4 ]
Yang, Cheng-Fu [4 ]
机构：
[1] Southern Taiwan Univ, Dept Electroopt Engn, Tainan, Taiwan
[2] Southern Taiwan Univ, Dept Elect Engn, Tainan, Taiwan
[3] Tung Fang Inst Technolo, Dept Elect Engn & Comp Sci, Kaohsiung, Taiwan
[4] Natl Kaohsiung Univ, Dept Chem & Mat Engn, Kaohsiung, Taiwan
来源：
HIGH-PERFORMANCE CERAMICS VI | 2010年 / 434-435卷
关键词：
Ba(Zr0.1Ti0.9)O-3; perovskite structure; ferroelectric; ITO/glass; FeRAM; THIN-FILMS; TEMPERATURE;
D O I：
10.4028/www.scientific.net/KEM.434-435.289
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Perovskite Ba(Zr0.1Ti0.9)O-3 (BZ1T9) ferroelectric thin films well deposited on ITO/glass substrates for applications in system-on-panel (SOP) devices are produced and investigated. The sputtering parameters of as-deposited BZ1T9 thin films were rf power of 160 W, chamber pressure of 10 mTorr, substrate temperature of 550 degrees C, and an oxygen concentration of 40%. From the SEM cross-sectional observation, the deposition rate were about 2.5 nm/min. Additionally, the maximum dielectric constant and leakage current density of annealed BZT films under the rapid temperature annealing would be increased, as the temperature increased to 650 degrees C. Further, the maximum remnant polarization and coercive field of BZT films were found and calculated from the p-E curves.
引用
收藏
页码：289 / +
页数：2
相关论文
共 50 条
  • [41] Phase transition behavior and electrical properties of lead-free (Ba1-xCax)(Zr0.1Ti0.9)O3 piezoelectric ceramics
    Tian, Ye
    Chao, Xiaolian
    Wei, Lingling
    Liang, Pengfei
    Yang, Zupei
    JOURNAL OF APPLIED PHYSICS, 2013, 113 (18)
  • [42] Preparation and Characterization of Mn-Doped (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3 Ceramics
    Di Loreto, A.
    Frattini, A.
    Machado, R.
    De Sanctis, O.
    Stachiotti, M. G.
    FERROELECTRICS, 2014, 463 (01) : 105 - 113
  • [43] (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3 Ceramics Synthesized by a Gel-Casting Method
    Xiong, Wei
    JOURNAL OF ELECTRONIC MATERIALS, 2016, 45 (08) : 4005 - 4009
  • [44] (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3 Ceramics Synthesized by a Gel-Casting Method
    Wei Xiong
    Journal of Electronic Materials, 2016, 45 : 4005 - 4009
  • [45] Dynamic hysteresis scaling of ferroelectric Pb0.9Ba0.1(Zr0.52Ti0.48)O3 thin films
    Guo, Y. Y.
    Wei, T.
    He, Q. Y.
    Liu, J-M
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2009, 21 (48)
  • [46] Synthesis of plate-like B-site complex perovskite Ba(Zr0.1Ti0.9)O3 microcrystals
    Li, Leilei
    Xu, Jie
    Cao, Shuyao
    Chen, Qian
    Liu, Junting
    Pawlikowska, Emilia
    Szafran, Mikolaj
    Gao, Feng
    MATERIALS LETTERS, 2019, 236 : 715 - 718
  • [47] The Electrical and Physical Properties of (Ba0.7Sr0.3)(Ti0.9Zr0.1)O3 Thin Films under Conventional Annealing Process
    Chen, Kai-Huang
    Yang, Cheng-Fu
    Diao, Chien-Chen
    HIGH-PERFORMANCE CERAMICS VI, 2010, 434-435 : 271 - +
  • [48] Phase formation, microstructure and dielectric properties of Ba(Zr0.1Ti0.9)O3 ceramics prepared via the combustion technique
    Julphunthong, Phongthorn
    Bongkarn, Theerachai
    CURRENT APPLIED PHYSICS, 2011, 11 (03) : S60 - S65
  • [49] Ho掺杂对Ba(Zr0.1Ti0.9)O3基陶瓷介电性能的影响
    马蓉
    崔斌
    胡登卫
    王艳
    宝鸡文理学院学报(自然科学版), 2021, 41 (03) : 46 - 50
  • [50] Investigation of ferroelectric, piezoelectric and mechanically coupled properties of lead-free (Ba0.85Ca0.15) (Zr0.1Ti0.9)O3 ceramics
    Sailaja, P.
    Kumar, N. Pavan
    Sowmya, N. Shara
    James, A. R.
    Kumar, Atul
    Arockiakumar, R.
    Srinivas, A.
    ADVANCES IN APPLIED CERAMICS, 2019, 118 (05) : 300 - 307
12345