Materials science issues of plasma source ion implantation

被引：19

作者：

Nastasi, M ^{[1
]}

Elmoursi, AA ^{[1
]}

Faehl, RJ ^{[1
]}

Hamdi, AH ^{[1
]}

Henins, I ^{[1
]}

Malaczynski, GW ^{[1
]}

Mantese, JV ^{[1
]}

Munson, C ^{[1
]}

Qui, X ^{[1
]}

Reass, WA ^{[1
]}

Rej, DJ ^{[1
]}

Scheuer, JT ^{[1
]}

Speck, CE ^{[1
]}

Walter, KC ^{[1
]}

Wood, BP ^{[1
]}

机构：

[1] LOS ALAMOS NATL LAB,LOS ALAMOS,NM 87545

来源：

ION-SOLID INTERACTIONS FOR MATERIALS MODIFICATION AND PROCESSING | 1996年 / 396卷

关键词：

D O I：

10.1017/CBO9780511565007.016

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：455 / 466

页数：12

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