Commercial plasma source ion implantation facility

被引：0
|
作者：
Scheuer, J.T. [1 ]
Walter, K.C. [1 ]
Adler, R.A. [1 ]
Horne, W.G. [1 ]
机构：
[1] Los Alamos Natl Lab, Los Alamos, United States
来源：
Surface and Coatings Technology | 1997年 / 93卷 / 2-3期
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页码：192 / 196
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