Commercial plasma source ion implantation facility

被引：0
|
作者：
Scheuer, J.T. [1 ]
Walter, K.C. [1 ]
Adler, R.A. [1 ]
Horne, W.G. [1 ]
机构：
[1] Los Alamos Natl Lab, Los Alamos, United States
来源：
Surface and Coatings Technology | 1997年 / 93卷 / 2-3期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：192 / 196
相关论文
共 50 条
  • [41] Surface modification of PET films by plasma source ion implantation
    Tanaka, T
    Yoshida, M
    Shinohara, M
    Watanabe, S
    Takagi, T
    POLYMER SURFACE MODIFICATION: RELEVANCE TO ADHESION, VOL 3, 2004, : 69 - 82
  • [42] TARGET TEMPERATURE PREDICTION FOR PLASMA SOURCE ION-IMPLANTATION
    BLANCHARD, JP
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 910 - 917
  • [43] Surface studies of plasma source ion implantation treated polystyrene
    Lee, Yeonhee
    Han, Seunghee
    Lee, Jung-Hye
    Yoon, Jung-Hyeon
    Lim, Hyun Eui
    Kim, Kang-Jin
    Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998, 16 (3 pt 2):
  • [44] Plasma source ion implantation project at Southwestern Institute of Physics
    Southwestern Inst of Physics, Sichuan, China
    Surf Coat Technol, 1-2 (105-110):
  • [45] MEASUREMENT OF ION SPECIES RATIO IN THE PLASMA SOURCE ION-IMPLANTATION PROCESS
    TANG, BY
    FETHERSTON, RP
    SHAMIM, M
    BREUN, RA
    CHEN, A
    CONRAD, JR
    JOURNAL OF APPLIED PHYSICS, 1993, 73 (09) : 4176 - 4180
  • [46] Application of the ECR slot antenna plasma source for ion implantation
    Korzec, D
    Raiko, V
    Engemann, J
    Gunzel, R
    Brutscher, J
    Moller, W
    SURFACE & COATINGS TECHNOLOGY, 1997, 93 (2-3): : 217 - 224
  • [47] PLASMA SOURCE ION-IMPLANTATION OF OXYGEN AND NITROGEN IN ALUMINUM
    GUNZEL, R
    WIESER, E
    RICHTER, E
    STEFFEN, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 927 - 930
  • [48] Reduction in surface resistivity of polymers by plasma source ion implantation
    Lim, H
    Lee, Y
    Han, S
    Kim, Y
    Cho, J
    Kim, K
    SURFACE & COATINGS TECHNOLOGY, 2002, 160 (2-3): : 158 - 164
  • [49] Secondary electron enhanced discharges in plasma source ion implantation
    Cluggish, BP
    Munson, CP
    JOURNAL OF APPLIED PHYSICS, 1998, 84 (11) : 5945 - 5955
  • [50] Surface studies of plasma source ion implantation treated polystyrene
    Lee, Y
    Han, SH
    Lee, JH
    Yoon, JH
    Lim, HE
    Kim, KJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03): : 1710 - 1715
12345