共 50 条
- [44] MONTE-CARLO METHODS AND MICROLITHOGRAPHY SIMULATION FOR ELECTRON AND X-RAY-BEAMS ADVANCES IN ELECTRONICS AND ELECTRON PHYSICS, 1987, 69 : 175 - 259
- [45] MONTE-CARLO SIMULATION OF SPATIALLY DISTRIBUTED BEAMS IN ELECTRON-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1305 - 1308
- [48] NEW ELECTRON MULTIPLE-SCATTERING DISTRIBUTIONS FOR MONTE-CARLO TRANSPORT SIMULATION NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 94 (1-2): : 1 - 10
- [50] COMPARISON OF FIELD DOSE-RATE MEASUREMENTS AND MONTE-CARLO CALCULATIONS ACTA PHYSICA ACADEMIAE SCIENTIARUM HUNGARICAE, 1982, 52 (3-4): : 397 - 404