Mathematical model for a micromachined accelerometer

被引：18
|
作者：
Lewis, CP
Kraft, M
Hesketh, TG
机构：
[1] Coventry University, School of Engineering, Priory St, Coventry, CV1 5FB, Q-block, Nonlinear Systems Design Group
来源：
TRANSACTIONS OF THE INSTITUTE OF MEASUREMENT AND CONTROL | 1996年 / 18卷 / 02期
关键词：
accelerometer; micromachined; mathematical model; simulation;
D O I：
10.1177/014233129601800204
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A mathematical model is developed for both open- and closed-loop accelerometers having capacitive sensing and electrostatic feedback. Test results on actual micromachined devices are compared with simulation employing the mathematical model.
引用
收藏
页码：92 / 98
页数：7
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