Micromachined convective accelerometer

被引：0
|
作者：
Li, Li-Jie [1 ]
Liang, Chun-Guang [1 ]
机构：
[1] Hebei Semiconductor Res. Inst., Shijiazhuang 050051, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2001年 / 22卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Accelerometers
引用
收藏
页码：465 / 468
相关论文
共 50 条
  • [1] Micromachined convective accelerometer and inclinometer
    Li, LJ
    Yang, YJ
    Zhao, T
    Zhao, YJ
    Liang, CG
    SMART STRUCTURES AND MATERIALS 2000: SMART ELECTRONICS AND MEMS, 2000, 3990 : 345 - 349
  • [2] Study on linearity of a micromachined convective accelerometer
    Luo, XB
    Li, ZX
    Guo, ZY
    Yang, YJ
    MICROELECTRONIC ENGINEERING, 2003, 65 (1-2) : 87 - 101
  • [3] Thermal optimization on micromachined convective accelerometer
    Luo, XB
    Li, ZX
    Guo, ZY
    Yang, YJ
    HEAT AND MASS TRANSFER, 2002, 38 (7-8) : 705 - 712
  • [4] Thermal optimization on micromachined convective accelerometer
    X. B. Luo
    Z. X. Li
    Z. Y. Guo
    Y. J. Yang
    Heat and Mass Transfer, 2002, 38 : 705 - 712
  • [5] A Study on the Performance Improvement of the Micromachined Convective Accelerometer
    Oh, Jun-Seok
    Youn, Sung-Kie
    TRANSACTIONS OF THE KOREAN SOCIETY OF MECHANICAL ENGINEERS A, 2007, 31 (05) : 570 - 577
  • [6] An optimized micromachined convective accelerometer with no proof mass
    Luo, XB
    Yang, YJ
    Zheng, F
    Li, ZX
    Guo, ZY
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2001, 11 (05) : 504 - 508
  • [7] A dual axis CMOS micromachined convective thermal accelerometer
    Garraud, Alexandra
    Giani, Alain
    Combette, Philippe
    Charlot, Benoit
    Richard, Mathieu
    SENSORS AND ACTUATORS A-PHYSICAL, 2011, 170 (1-2) : 44 - 50
  • [8] A Low-Power and Robust Micromachined Thermal Convective Accelerometer
    Ye, Yizhou
    Wan, Shu
    Hou, Chen
    He, Xuefeng
    Li, Shunbo
    MICROMACHINES, 2024, 15 (07)
  • [9] A liquid-filled buoyancy-driven convective micromachined accelerometer
    Lin, L
    Jones, J
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (05) : 1061 - 1069
  • [10] Development of a dual-axis micromachined convective accelerometer with an effective heater geometry
    Park, Usung
    Park, Byoungkyoo
    Moon, Il-Kwon
    Kim, Dongsik
    Kim, Joonwon
    MICROELECTRONIC ENGINEERING, 2011, 88 (03) : 276 - 281
12345