Micromachined convective accelerometer

被引：0
|
作者：
Li, Li-Jie [1 ]
Liang, Chun-Guang [1 ]
机构：
[1] Hebei Semiconductor Res. Inst., Shijiazhuang 050051, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2001年 / 22卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Accelerometers
引用
收藏
页码：465 / 468
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