Micromachined convective accelerometer

被引：0
|
作者：
Li, Li-Jie [1 ]
Liang, Chun-Guang [1 ]
机构：
[1] Hebei Semiconductor Res. Inst., Shijiazhuang 050051, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2001年 / 22卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Accelerometers
引用
收藏
页码：465 / 468
相关论文
共 50 条
  • [21] Bulk micromachined resonant accelerometer
    Ying, Z
    Jia, YB
    Hao, YL
    Zhang, GX
    ISTM/2003: 5TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, CONFERENCE PROCEEDINGS, 2003, : 41 - 43
  • [22] Micromachined accelerometer with frame structure
    Chen, W. P.
    Zhao, Z. G.
    Liu, X. W.
    4TH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY (ISIST' 2006), 2006, 48 : 259 - 263
  • [23] A surface micromachined latching accelerometer
    Sun, XQ
    Zhou, SF
    Carr, WN
    TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 1189 - 1192
  • [24] Micromachined accelerometer with no proof mass
    Leung, AM
    Jones, J
    Czyzewska, E
    Chen, JM
    Pascal, M
    INTERNATIONAL ELECTRON DEVICES MEETING - 1997, TECHNICAL DIGEST, 1997, : 899 - 902
  • [25] Design and simulation of a micromachined accelerometer
    Hassan, Hazem
    Ibrahim, Hassan
    Elsedawy, Salah
    PROCEEDINGS OF THE 6TH WSEAS INTERNATIONAL CONFERENCE ON SYSTEM SCIENCE AND SIMULATION IN ENGINEERING (ICOSSSE '07): SYSTEM SCIENCE AND SIMULATION IN ENGINEERING, 2007, : 363 - +
  • [26] GaAlAs-based micromachined accelerometer
    Konczewicz, L
    Lee, HY
    Sadowski, ML
    Letartre, X
    Leclercq, JL
    Viktorovitch, P
    Robert, JL
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 2001, 223 (02): : 593 - 596
  • [27] Low stress packaging of a micromachined accelerometer
    Li, G
    Tseng, AA
    IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, 2001, 24 (01): : 18 - 25
  • [28] Research on forces balance of micromachined accelerometer
    Wu, YL
    Wu, XZ
    Li, SY
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES, 2001, 4601 : 324 - 327
  • [29] A two-dimensional micromachined accelerometer
    Ahmad, H
    AlKhalili, AJ
    Landsberger, LM
    Kahrizi, M
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1997, 46 (01) : 18 - 26
  • [30] A 2D micromachined accelerometer
    Ahmad, H
    AlKhalili, AJ
    Landsberger, L
    Kahrizi, M
    ICECS 96 - PROCEEDINGS OF THE THIRD IEEE INTERNATIONAL CONFERENCE ON ELECTRONICS, CIRCUITS, AND SYSTEMS, VOLS 1 AND 2, 1996, : 908 - 911
12345