Mathematical model of piezoelectric MEMS accelerometer

被引：0
|
作者：
Pereyma, Mykola [1 ]
机构：
[1] Lviv Polytech Natl Univ, CAD Dept, St Bandera 12, UA-79013 Lvov, Ukraine
来源：
PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN | 2008年
关键词：
MEMS; accelerometer; piezoelectric;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper mathematical model of the piezoelectric accelerometer based on unimorph cantilever beam 31 direction was considered. Numerical verification of the mathematical model was performed.
引用
收藏
页码：69 / +
页数：2
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