Electron transport in silicon nanostructures based on ultra-thin SOI

被引:0
|
作者
Pouydebasque, A
Montes, L
Zimmermann, J
Balestra, F
Fraboulet, D
Mariolle, D
Gautier, J
Schopfer, F
Bouchiat, V
Saminadayar, L
机构
[1] Inst Microelect Electromagnetisme & Photon, F-38016 Grenoble 1, France
[2] Ctr Rech Tres Basses Temp, F-38042 Grenoble 9, France
[3] CEA Grenoble, DMEL, LETI, F-38054 Grenoble 9, France
来源
JOURNAL DE PHYSIQUE IV | 2002年 / 12卷 / PR3期
关键词
D O I
10.1051/jp420020044
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We present an experimental study of ultra-thin SOI-based nanostructures. The systems have a van der Pauw geometry, with a radius of 2mum. The resistance per square R is first analyzed in the temperature range 300 K - 4.2 K, and for different conditions of back gate voltages (0 V< V-g < 4 V). The magnetoresistance was measured at very low temperatures (10 mK < T< 900 mK). for magnetic fields -2500 G< B < 2500 G. The experimental results exhibit a negative magnetoresistance that we attribute to quantum interference effects due to time reversed electron paths and known as weak localization. Fundamental properties of the material at low temperatures such as the electron phase coherence length to the elastic mean free path l(phi) and the mobility mu are then estimated throughout the obtained results.
引用
收藏
页码:97 / 101
页数:5
相关论文
共 50 条
  • [31] Quantum mechanical transport phenomena of ultra-thin silicon-on-insulator devices
    Omura, Y.
    Zairyo/Journal of the Society of Materials Science, Japan, 2001, 50 (04) : 353 - 356
  • [32] ULTRA-THIN SECTIONING FOR ELECTRON MICROSCOPY
    MASSEY, BW
    STAIN TECHNOLOGY, 1953, 28 (01): : 19 - 26
  • [33] Fracture and delamination of thin multilayers on ultra-thin silicon
    Kravchenko, G
    Bagdahn, J
    Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005, : 419 - 422
  • [34] Electron mobility and spin lifetime enhancement in strained ultra-thin silicon films
    Osintsev, Dmitri
    Sverdlov, Viktor
    Selberherr, Siegfried
    SOLID-STATE ELECTRONICS, 2015, 112 : 46 - 50
  • [35] Ultra-thin alumina and silicon nitride MEMS fabricated membranes for the electron multiplication
    Prodanovic, V
    Chan, H. W.
    Graaf, H. V. D.
    Sarro, P. M.
    NANOTECHNOLOGY, 2018, 29 (15)
  • [36] Momentum-Space Imaging of Ultra-Thin Electron Liquids in δ-Doped Silicon
    Constantinou, Procopios
    Stock, Taylor J. Z.
    Crane, Eleanor
    Kolker, Alexander
    van Loon, Marcel
    Li, Juerong
    Fearn, Sarah
    Bornemann, Henric
    D'Anna, Nicolo
    Fisher, Andrew J. J.
    Strocov, Vladimir N. N.
    Aeppli, Gabriel
    Curson, Neil J. J.
    Schofield, Steven R. R.
    ADVANCED SCIENCE, 2023, 10 (27)
  • [37] Analysis of the effects of strain in ultra-thin SOI MOS devices
    Barin, Nicola
    Fiegna, Claudio
    Sangiorgi, Enrico
    FRONTIERS IN ELECTRONICS, 2006, 41 : 105 - +
  • [38] Parasitic bipolar effect in ultra-thin FD SOI MOSFETs
    Liu, F. Y.
    Ionica, I.
    Bawedin, M.
    Cristoloveanu, S.
    SOLID-STATE ELECTRONICS, 2015, 112 : 29 - 36
  • [39] Examination of hole mobility in ultra-thin body SOI MOSFETs
    Ren, ZB
    Solomon, PM
    Kanarsky, T
    Doris, B
    Dokumaci, O
    Oldiges, P
    Roy, RA
    Jones, EC
    Ieong, M
    Miller, RJ
    Haensch, W
    Wong, HSP
    INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST, 2002, : 51 - 54
  • [40] Ultra-Thin SOI for 20nm node and beyond
    Aulnette, C.
    Schwarzenbach, W.
    Daval, N.
    Bonnin, O.
    Nguyen, B-Y
    Mazure, C.
    Maleville, C.
    Cheng, K.
    Ponoth, S.
    Khakifirooz, A.
    Hook, T.
    Doris, B.
    2011 IEEE INTERNATIONAL SOI CONFERENCE, 2011,