共 50 条
- [36] Potential of High-density Convergent Plasma Sputtering Device for Magnetic Film Deposition E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2019, 17 : 27 - 31
- [38] Production of high-density plasmas in electron-beam-excited plasma device Ito, Akihiro, 1600, JJAP, Minato-ku, Japan (33):