In this paper, a physically based analytical threshold-voltage model is developed for nanoscale strained-Si on silicon-germanium-on-insulator MOSFETs for the first time, taking into account short-channel effects. The model is derived by solving the 2-D Poisson equation in strained-Si and SiGe layers. The effects of various important device parameters like strain (Ge mole fraction in the SiGe layer), body doping, gate workfunction, strained-Si thin film and SiGe layer thickness, etc., has been considered. We have demonstrated that increasing strain in order to enhance device performance can lead to undesirable threshold-voltage rolloff. The model is found to agree well with the 2-D simulation results.
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices Educ, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices Educ, Xian 710071, Peoples R China
Xin Yan-Hui
Liu Hong-Xia
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices Educ, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices Educ, Xian 710071, Peoples R China
Liu Hong-Xia
Fan Xiao-Jiao
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices Educ, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices Educ, Xian 710071, Peoples R China
Fan Xiao-Jiao
Zhuo Qing-Qing
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices Educ, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices Educ, Xian 710071, Peoples R China
机构:
CEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Baudot, Sophie
Andrieu, Francois
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Andrieu, Francois
Weber, Olivier
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Weber, Olivier
Perreau, Pierre
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Perreau, Pierre
Damlencourt, Jean-Francois
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Damlencourt, Jean-Francois
Barnola, Sebastien
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Barnola, Sebastien
Salvetat, Thierry
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Salvetat, Thierry
Tosti, Lucie
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Tosti, Lucie
Brevard, Laurent
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Brevard, Laurent
Lafond, Dominique
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Lafond, Dominique
Eymery, Joel
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CEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France
Eymery, Joel
Faynot, Olivier
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CEA LETI MINATEC, F-38054 Grenoble 9, FranceCEA, Equipe Mixte CEA CNRS Nanophys & Semicond, SP2M, INAC, F-38054 Grenoble 9, France