Optical refractive index biosensor using evanescently coupled lateral Bragg gratings on silicon-on-insulator

被引：3

作者：

Mendez-Astudillo, Manuel ^{[1
]}

Takahisa, Hiroki ^{[1
]}

Okayama, Hideaki ^{[1
,2
]}

Nakajima, Hirochika ^{[1
]}

机构：

[1] Waseda Univ, Fac Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan

[2] Oki Elect Ind Co Ltd, Ctr Res & Dev, Warabi, Saitama 3358510, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 08期

关键词：

WAVE-GUIDES; RING RESONATORS; INTERFEROMETER; SENSORS;

D O I：

10.7567/JJAP.55.08RE09

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this paper, we present a compact silicon-on-insulator optical biosensor based on lateral Bragg gratings evanescently coupled to a waveguide. The device is fabricated by electron-beam lithography and dry-etched in a single step with inductive coupled plasma reactive ion etching (ICP-RIE). Fully etched grating couplers are used to couple the light in and out of the chip, while lateral Bragg gratings are used as the sensing element of the device. A sensitivity of 22 nm/RIU is obtained by exposing the device to deionized water with different NaCl concentrations with a footprint area of 15 x 4 mu m(2) that allows for densely multiplexed solutions. (C) 2016 The Japan Society of Applied Physics

引用

页数：4

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