Optical refractive index biosensor using evanescently coupled lateral Bragg gratings on silicon-on-insulator

被引：3
|
作者：
Mendez-Astudillo, Manuel [1 ]
Takahisa, Hiroki [1 ]
Okayama, Hideaki [1 ,2 ]
Nakajima, Hirochika [1 ]
机构：
[1] Waseda Univ, Fac Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan
[2] Oki Elect Ind Co Ltd, Ctr Res & Dev, Warabi, Saitama 3358510, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 08期
关键词：
WAVE-GUIDES; RING RESONATORS; INTERFEROMETER; SENSORS;
D O I：
10.7567/JJAP.55.08RE09
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this paper, we present a compact silicon-on-insulator optical biosensor based on lateral Bragg gratings evanescently coupled to a waveguide. The device is fabricated by electron-beam lithography and dry-etched in a single step with inductive coupled plasma reactive ion etching (ICP-RIE). Fully etched grating couplers are used to couple the light in and out of the chip, while lateral Bragg gratings are used as the sensing element of the device. A sensitivity of 22 nm/RIU is obtained by exposing the device to deionized water with different NaCl concentrations with a footprint area of 15 x 4 mu m(2) that allows for densely multiplexed solutions. (C) 2016 The Japan Society of Applied Physics
引用
收藏
页数：4
相关论文
共 50 条
  • [31] Silicon-on-Insulator Ring-Shaped Photonic Crystal Waveguides for Refractive Index Sensing
    Pu, Minhao
    Liu, Liu
    Frandsen, Lars H.
    Ou, Haiyan
    Yvind, Kresten
    Hvam, Jorn M.
    2010 CONFERENCE ON OPTICAL FIBER COMMUNICATION OFC COLLOCATED NATIONAL FIBER OPTIC ENGINEERS CONFERENCE OFC-NFOEC, 2010,
  • [32] STUDY OF REFRACTIVE-INDEX PROFILES OF ION-IMPLANTED SILICON-ON-INSULATOR MATERIAL
    SWART, PL
    LACQUET, BM
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 84 (02): : 281 - 285
  • [33] Experimental Extraction of Effective Refractive Index and Thermo-Optic Coefficients of Silicon-on-Insulator Waveguides Using Interferometers
    Dwivedi, Sarvagya
    Ruocco, Alfonso
    Vanslembrouck, Michael
    Spuesens, Thijs
    Bienstman, Peter
    Dumon, Pieter
    Van Vaerenbergh, Thomas
    Bogaerts, Wim
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2015, 33 (21) : 4471 - 4477
  • [34] Ultra-compact silicon-on-insulator optical filter based on sidewall Bragg grating
    Tu, Xiaoguang
    Chen, Shaowu
    Yu, Jinzhong
    Wang, Qiming
    Chin, Mee Koy
    2008 IEEE PHOTONICSGLOBAL@SINGAPORE (IPGC), VOLS 1 AND 2, 2008, : 31 - +
  • [35] Refractive index evaluation of porous silicon using bragg reflectors
    Estrada-Wiese, D.
    del Rio, J. A.
    REVISTA MEXICANA DE FISICA, 2018, 64 (01) : 72 - 81
  • [36] Optical biosensor based on silicon-on-insulator microring cavities for specific protein binding detection
    De Vos, Katrien M.
    Bartolozzi, Irene
    Bienstman, Peter
    Baets, Roel
    Schacht, Etienne
    NANOSCALE IMAGING, SPECTROSCOPY, SENSING, AND ACTUATION FOR BIOMEDICAL APPLICATIONS IV, 2007, 6447
  • [37] Compact resonant Bragg grating filters using submicron Silicon-On-Insulator (SOI) waveguide for optical communication network
    Prabhathan, P.
    Murukeshan, V. M.
    Jing, Zhang
    OPTOELECTRONIC DEVICES AND INTEGRATION III, 2010, 7847
  • [38] High resolution refractive index sensor by using thinned fiber Bragg gratings
    Iadicicco, A
    Cusano, A
    Cutolo, A
    Giordano, M
    SECOND EUROPEAN WORKSHOP ON OPTICAL FIBRE SENSORS: PROCEEDINGS, 2004, 5502 : 251 - 254
  • [39] Refractive index biosensor using sidewall gratings in dual-slot waveguide
    Sahu, Sourabh
    Ali, Jalil
    Singh, Ghanshyam
    OPTICS COMMUNICATIONS, 2017, 402 : 408 - 412
  • [40] Waveguide dispersion effects in silicon-on-insulator coupled-resonator optical waveguides
    Cooper, Michael L.
    Gupta, Greeshma
    Schneider, Mark A.
    Green, William M. J.
    Assefa, Solomon
    Xia, Fengnian
    Gifford, Dawn K.
    Mookherjea, Shayan
    OPTICS LETTERS, 2010, 35 (18) : 3030 - 3032
12345