Optical refractive index biosensor using evanescently coupled lateral Bragg gratings on silicon-on-insulator

被引：3
|
作者：
Mendez-Astudillo, Manuel [1 ]
Takahisa, Hiroki [1 ]
Okayama, Hideaki [1 ,2 ]
Nakajima, Hirochika [1 ]
机构：
[1] Waseda Univ, Fac Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan
[2] Oki Elect Ind Co Ltd, Ctr Res & Dev, Warabi, Saitama 3358510, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 08期
关键词：
WAVE-GUIDES; RING RESONATORS; INTERFEROMETER; SENSORS;
D O I：
10.7567/JJAP.55.08RE09
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this paper, we present a compact silicon-on-insulator optical biosensor based on lateral Bragg gratings evanescently coupled to a waveguide. The device is fabricated by electron-beam lithography and dry-etched in a single step with inductive coupled plasma reactive ion etching (ICP-RIE). Fully etched grating couplers are used to couple the light in and out of the chip, while lateral Bragg gratings are used as the sensing element of the device. A sensitivity of 22 nm/RIU is obtained by exposing the device to deionized water with different NaCl concentrations with a footprint area of 15 x 4 mu m(2) that allows for densely multiplexed solutions. (C) 2016 The Japan Society of Applied Physics
引用
收藏
页数：4
相关论文
共 50 条
  • [21] Retrieval of optical solitons in fiber Bragg gratings for high-order coupled system with arbitrary refractive index
    Khalifa, Abeer S.
    Badra, Niveen M.
    Ahmed, Hamdy M.
    Rabie, Wafaa B.
    Optik, 2023, 287
  • [22] 60-nm-thick basic photonic components and Bragg gratings on the silicon-on-insulator platform
    Zou, Zhi
    Zhou, Linjie
    Li, Xinwan
    Chen, Jianping
    OPTICS EXPRESS, 2015, 23 (16): : 20784 - 20795
  • [23] Porous Silicon Based Bragg-Grating Resonator for Refractive Index Biosensor
    Sourabh Sahu
    Jalil Ali
    Preecha P. Yupapin
    Ghanshyam Singh
    Photonic Sensors, 2018, 8 : 248 - 254
  • [24] High Extinction Ratio Polarization Selective TE/TM Bragg Gratings filters on silicon-on-insulator
    Klitis, Charalambos
    Cantarella, Giuseppe
    Strain, Michael J.
    Sorel, Marc
    2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC), 2017,
  • [25] Bandpass integrated Bragg gratings in silicon-on-insulator with well-controlled amplitude and phase responses
    Simard, Alexandre D.
    Strain, Michael J.
    Meriggi, Laura
    Sorel, Marc
    LaRochelle, Sophie
    OPTICS LETTERS, 2015, 40 (05) : 736 - 739
  • [26] Tunable spiral Bragg gratings in 60-nm-thick silicon-on-insulator strip waveguides
    Zou, Zhi
    Zhou, Linjie
    Wang, Minjuan
    Wu, Kan
    Chen, Jianping
    OPTICS EXPRESS, 2016, 24 (12): : 12831 - 12839
  • [27] Porous Silicon Based Bragg-Grating Resonator for Refractive Index Biosensor
    Sahu, Sourabh
    Ali, Jalil
    Yupapin, Preecha P.
    Singh, Ghanshyam
    PHOTONIC SENSORS, 2018, 8 (03) : 248 - 254
  • [28] Wideband subwavelength gratings for coupling between silicon-on-insulator waveguides and optical fibers
    Chen, Xia
    Xu, Ke
    Cheng, Zhenzhou
    Fung, Christy K. Y.
    Tsang, Hon K.
    OPTICS LETTERS, 2012, 37 (17) : 3483 - 3485
  • [29] Exposed core microstructured optical fiber Bragg gratings: refractive index sensing
    Warren-Smith, Stephen C.
    Monro, Tanya M.
    OPTICS EXPRESS, 2014, 22 (02): : 1480 - 1489
  • [30] Coupled resonator optical waveguides based on silicon-on-insulator photonic wires
    Xia, Fengnian
    Sekaric, Lidija
    O'Boyle, Martin
    Vlasov, Yurii
    APPLIED PHYSICS LETTERS, 2006, 89 (04)
12345