Optical refractive index biosensor using evanescently coupled lateral Bragg gratings on silicon-on-insulator

被引：3
|
作者：
Mendez-Astudillo, Manuel [1 ]
Takahisa, Hiroki [1 ]
Okayama, Hideaki [1 ,2 ]
Nakajima, Hirochika [1 ]
机构：
[1] Waseda Univ, Fac Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan
[2] Oki Elect Ind Co Ltd, Ctr Res & Dev, Warabi, Saitama 3358510, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 08期
关键词：
WAVE-GUIDES; RING RESONATORS; INTERFEROMETER; SENSORS;
D O I：
10.7567/JJAP.55.08RE09
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this paper, we present a compact silicon-on-insulator optical biosensor based on lateral Bragg gratings evanescently coupled to a waveguide. The device is fabricated by electron-beam lithography and dry-etched in a single step with inductive coupled plasma reactive ion etching (ICP-RIE). Fully etched grating couplers are used to couple the light in and out of the chip, while lateral Bragg gratings are used as the sensing element of the device. A sensitivity of 22 nm/RIU is obtained by exposing the device to deionized water with different NaCl concentrations with a footprint area of 15 x 4 mu m(2) that allows for densely multiplexed solutions. (C) 2016 The Japan Society of Applied Physics
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页数：4
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