Origin of Green Coloration in AlN Crystals Grown on SiC Seeds

被引：0
|
作者：
Nagalyuk, S. S. [1 ]
Mokhov, E. N. [1 ]
Kazarova, O. P. [1 ]
Ber, B. Y. [1 ]
Anisimov, A. A. [1 ]
Breev, I. D. [1 ]
机构：
[1] Ioffe Inst, St Petersburg, Russia
来源：
SEMICONDUCTORS | 2021年 / 55卷 / 06期
关键词：
AlN crystal; SiC seed; green or dark color; amorphous carbon; SUBLIMATION GROWTH;
D O I：
10.1134/S1063782621060099
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The origns leading to the appearance of a green color of AlN crystals grown by sublimation on SiC seeds are investigated. It was shown by the method of secondary ion mass spectroscopy that the color of crystals weakly depends on the content of silicon and carbon, and a green or dark color appears only with an increased content of carbon in comparison with silicon. The presence of a separate amorphous carbon phase in these crystals was established by the method of Raman light scattering. The separation of the carbon phase in the process of crystal growth makes it difficult to obtain high-quality AlN crystals, as well as AlN-SiC solid solutions. The influence of growth conditions on the optical properties of AlN crystals is analyzed.
引用
收藏
页码：546 / 550
页数：5
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