Litho enhancements for 45nm-node MuGFETs

被引：0

作者：

Verhaegen, S ^{[1
]}

Ercken, M ^{[1
]}

Nackaerts, A ^{[1
]}

Vandenberghe, G ^{[1
]}

机构：

[1] IMEC, B-3001 Heverlee, Belgium

来源：

MICROLITHOGRAPHY WORLD | 2005年 / 14卷 / 03期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：14 / 17

页数：4

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