Single-Grain Si TFTs Fabricated on a Precursor from Doctor-Blade Coated Liquid-Si

被引：0
|
作者：
Zhang, J. [1 ]
Trifunovic, M. [1 ]
van der Zwan, M. [1 ]
Takagishi, H. [2 ]
Shimoda, T. [2 ,3 ]
Ishihara, R. [1 ,3 ]
机构：
[1] Delft Univ Technol, NL-2600 AA Delft, Netherlands
[2] Japan Sci & Technol Agcy, Yokosuka, Kanagawa, Japan
[3] Japan Adv Inst Sci & Technol, Nomi, Ishikawa, Japan
来源：
THIN FILM TRANSISTORS 12 (TFT 12) | 2014年 / 64卷 / 10期
关键词：
THIN-FILM TRANSISTORS;
D O I：
10.1149/06410.0031ecst
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Printing is attractive for manufacturing flexible circuits. This manuscript presents our investigation of single-grain Si TFTs fabricated from printed liquid-Si, on a polyimide substrate with the maximum process temperature of 350 degrees C. The field-effect mobility is 460 cm2/Vs for electrons and 121 cm(2)/Vs for the holes. CMOS inverters were also fabricated. The devices function at the bending diameter of 3 mm. The device performance under the bending stress was discussed.
引用
收藏
页码：31 / 37
页数：7
相关论文
共 20 条
  • [1] Single-grain Si thin-film transistors on flexible polyimide substrate fabricated from doctor-blade coated liquid-Si
    Zhang, J.
    Trifunovic, M.
    van der Zwan, M.
    Takagishi, H.
    Kawajiri, R.
    Shimoda, T.
    Beenakker, C. I. M.
    Ishihara, R.
    APPLIED PHYSICS LETTERS, 2013, 102 (24)
  • [2] Single-Grain Si TFTs Fabricated by Liquid-Si and Long-Pulse Excimer-Laser
    Ishihara, Ryoichi
    Zhang, Jin
    Trifunovic, Miki
    van der Zwan, Michiel
    Takagishi, Hideyuki
    Kawajiri, Ryo
    Shimoda, Tatsuya
    Beenakker, C. I. M.
    THIN FILM TRANSISTORS 11 (TFT 11), 2012, 50 (08): : 49 - 53
  • [3] Single-Grain Si TFTs Fabricated From Sputtered Si on a Polyimide Substrate
    Zhang, Jin
    van der Zwan, Michiel
    Ishihara, Ryoichi
    JOURNAL OF DISPLAY TECHNOLOGY, 2014, 10 (11): : 945 - 949
  • [4] Single-Grain Si TFTs using Spin-Coated Liquid-Silicon
    Zhang, Jin
    Ishihara, Ryoichi
    Tagagishi, Hideyuki
    Kawajiri, Ryo
    Shimoda, Tatsuya
    Beenakker, C. I. M.
    2011 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2011,
  • [5] Reliability of Single-Grain Silicon TFTs Fabricated from Spin-Coated Liquid-Silicon
    Zhang, Jin
    Ishihara, Ryoichi
    Takagishi, Hideyuki
    Kawajiri, Ryo
    Shimoda, Tatsuya
    Beenakker, C. I. M.
    2012 19TH INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD): TFT TECHNOLOGIES AND FPD MATERIALS, 2012, : 309 - 312
  • [6] Single-grain Si TFTs and circuits fabricated through advanced excimer-laser crystallization
    Ishihara, Ryoichi
    Rana, Vikas
    He, Ming
    Hiroshima, Y.
    Inoue, S.
    Metselaar, Wim
    Beenakker, Kees
    SOLID-STATE ELECTRONICS, 2008, 52 (03) : 353 - 358
  • [7] Solution processed single-grain Si TFTs on a plastic substrate
    Ishihara, Ryoichi
    Zhang, Jin
    Zwan, Michiel V. D.
    Trifunovic, Miki
    Takagishi, Hideyuki
    Shimoda, Tatsuya
    Digest of Technical Papers - SID International Symposium, 2014, 45 (01): : 439 - 442
  • [8] Monolithic 3D Integration of Single-Grain Si TFTs
    Mofrad, Mohammad Reza Tajari
    Ishihara, Ryoichi
    Derakhshandeh, Jaber
    Baiano, Alessandro
    van der Cingel, Johan
    Beenakker, Cees
    AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008, 2008, 1066 : 483 - 489
  • [9] Single-grain Si TFTs for high-speed flexible electronics
    Ishihara, Ryoichi
    Chen, Tao
    van der Zwan, Michiel
    He, Ming
    Schellevis, H.
    Beenakker, Kees
    ADVANCES IN DISPLAY TECHNOLOGIES AND E-PAPERS AND FLEXIBLE DISPLAYS, 2011, 7956
  • [10] Single-grain Si TFTs and circuits for flexible electronics and 3D-ICs
    Ishihara, Ryoichi
    Rana, Vikas
    He, Ming
    Metselaar, Wim
    Beenakker, Kees
    Hiroshima, Yasushi
    Abe, Daisuke
    Inoue, Satoshi
    2007 SID INTERNATIONAL SYMPOSIUM, DIGEST OF TECHNICAL PAPERS, VOL XXXVIII, BOOKS I AND II, 2007, 38 : 252 - +
12