Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

被引：0

作者：

Pashchenko, Vladimir ^{[1
]}

Parsapour, Fazel ^{[1
]}

Ballandras, Sylvain ^{[2
]}

Haffner, Ken ^{[3
]}

Muralt, Paul ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Electroceram Thin Films Grp, Lausanne, Switzerland

[2] TEMIS Innovat, Frecnsys, Besancon, France

[3] GE Switzerland, GE Power Serv, Baden, Switzerland

来源：

2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2017年

关键词：

thin film; AlScN; piezoelectric; resonator; BAW; SAW; FBAR; hybrid transducer; MEMS; simulation; COMSOL;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al0.85Sc0.15N piezoelectric film on the silicon substrate were fabricated and characterized.

引用

页数：3

共 47 条

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