Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

被引：0
|
作者：
Pashchenko, Vladimir [1 ]
Parsapour, Fazel [1 ]
Ballandras, Sylvain [2 ]
Haffner, Ken [3 ]
Muralt, Paul [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Electroceram Thin Films Grp, Lausanne, Switzerland
[2] TEMIS Innovat, Frecnsys, Besancon, France
[3] GE Switzerland, GE Power Serv, Baden, Switzerland
来源：
2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2017年
关键词：
thin film; AlScN; piezoelectric; resonator; BAW; SAW; FBAR; hybrid transducer; MEMS; simulation; COMSOL;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al0.85Sc0.15N piezoelectric film on the silicon substrate were fabricated and characterized.
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页数：3
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