Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

被引：0
|
作者：
Pashchenko, Vladimir [1 ]
Parsapour, Fazel [1 ]
Ballandras, Sylvain [2 ]
Haffner, Ken [3 ]
Muralt, Paul [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Electroceram Thin Films Grp, Lausanne, Switzerland
[2] TEMIS Innovat, Frecnsys, Besancon, France
[3] GE Switzerland, GE Power Serv, Baden, Switzerland
来源：
2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2017年
关键词：
thin film; AlScN; piezoelectric; resonator; BAW; SAW; FBAR; hybrid transducer; MEMS; simulation; COMSOL;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al0.85Sc0.15N piezoelectric film on the silicon substrate were fabricated and characterized.
引用
收藏
页数：3
相关论文
共 47 条
  • [31] Theoretical Analysis and Design of Longitudinal Leaky SAW Device Consisting of ScA1N Film / Piezoelectric Single Crystal Substrate
    Suzuki, Masashi
    Kakio, Shoji
    2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2018,
  • [32] A pressure transducer using a metallic tuning fork with thin film piezoelectric drive and pick-up
    Jones, BE
    Cheshmehdoost, A
    Barker, AJ
    Mookherjee, PB
    Randall, DS
    Rakowski, RT
    Rees, D
    Crowther, SN
    Fry, PW
    Rudkin, MJ
    SENSORS AND THEIR APPLICATIONS VIII, 1997, : 77 - 82
  • [33] SMALL RIPPLE ACOUSTIC SURFACE WAVE FILTER USING PIEZOELECTRIC THIN FILM UNIDIRECTIONAL TRANSDUCER.
    Sato, H.
    Meguro, T.
    Yamanouchi, K.
    Shibayama, K.
    1977, : 740 - 743
  • [34] Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter
    Tang, IT
    Chen, HJ
    Hwang, WC
    Wang, YC
    Houng, MP
    Wang, YH
    JOURNAL OF CRYSTAL GROWTH, 2004, 262 (1-4) : 461 - 466
  • [35] SMALL RIPPLE ACOUSTIC SURFACE-WAVE FILTER USING PIEZOELECTRIC THIN-FILM UNIDIRECTIONAL TRANSDUCER
    SATO, H
    MEGURO, T
    YAMANOUCHI, K
    SHIBAYAMA, K
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1978, 25 (04): : 255 - 255
  • [36] Optimization of indirect magnetoelectric effect in thin-film/substrate/piezoelectric-actuator heterostructure using polymer substrate
    Gueye, Mouhamadou
    Zighem, Fatih
    Faurie, Damien
    Belmeguenai, Mohamed
    Mercone, Silvana
    APPLIED PHYSICS LETTERS, 2014, 105 (05)
  • [37] Non-Polar a-plane AlScN(11(2)over-bar0) Thin Film Based SAW Resonators with Significantly Improved Electromechanical Coupling
    Ding, Anli
    Driad, Rachid
    Lu, Yuan
    Feil, Niclas M.
    Kirste, Lutz
    Christoph, Tim
    Ambacher, Oliver
    Zukauskaite, Agne
    PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2020,
  • [38] Fabrication and characteristics analysis of SAW filter using Al0.36Ga0.64N thin film on sapphire substrate
    Jane, CY
    Park, MJ
    Ryu, SY
    Choi, HC
    Lee, JH
    Lee, YH
    INTERNATIONAL WORKSHOP ON NITRIDE SEMICONDUCTORS, PROCEEDINGS, 2002, : 248 - 252
  • [39] Rapid Wave Velocity Measurement by Brillouin Scattering Using Coherent Phonons Induced by ScAlN Piezoelectric Thin-Film Transducer
    Kawabe, Masahiko
    Takayanagi, Shinji
    Ichihashi, Hayato
    Suzuki, Masashi
    Yanagitani, Takahiko
    Matsukawa, Mami
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2018, 65 (10) : 1882 - 1887
  • [40] Simple millimeter-scale robot using Pb(Zr, Ti) piezoelectric thin film actuator on titanium substrate
    Hirotaka Hida
    Yuki Morita
    Fumiya Kurokawa
    Yuichi Tsujiura
    Isaku Kanno
    Microsystem Technologies, 2016, 22 : 1429 - 1436
12345