Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

被引：0
|
作者：
Pashchenko, Vladimir [1 ]
Parsapour, Fazel [1 ]
Ballandras, Sylvain [2 ]
Haffner, Ken [3 ]
Muralt, Paul [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Electroceram Thin Films Grp, Lausanne, Switzerland
[2] TEMIS Innovat, Frecnsys, Besancon, France
[3] GE Switzerland, GE Power Serv, Baden, Switzerland
来源：
2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2017年
关键词：
thin film; AlScN; piezoelectric; resonator; BAW; SAW; FBAR; hybrid transducer; MEMS; simulation; COMSOL;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al0.85Sc0.15N piezoelectric film on the silicon substrate were fabricated and characterized.
引用
收藏
页数：3
相关论文
共 47 条
  • [1] Hybrid BAW/SAW AlN and AlScN Thin Film Resonator First Experimental data
    Pashchenko, Vladimir
    Matloub, Ramin
    Parsapourkolour, Fazel
    Muralt, Paul
    Ballandras, Sylvain
    Haffner, Ken
    2016 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2016,
  • [2] PIEZOELECTRIC THIN-FILM UNIDIRECTIONAL SAW TRANSDUCER AND FILTER
    SATO, H
    MEGURO, T
    YAMANOUCHI, K
    SHIBAYAMA, K
    PROCEEDINGS OF THE IEEE, 1978, 66 (01) : 102 - 104
  • [3] SAW Temperature and Humidity Assembled Sensor Based on AlScN Piezoelectric Thin Film
    Hu, Yue
    Wang, Yuxin
    Li, Chuanxu
    Ren, Hao
    Lou, Liang
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2025, 72 (03) : 1315 - 1322
  • [4] Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication
    Pashchenko, V.
    Mertin, S.
    Parsapour, F.
    Li, J.
    Muralt, P.
    Ballandras, S.
    2017 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC), 2017, : 565 - 566
  • [5] Analysis of a SAW-BAW mutual transducer of finite length on piezoelectric substrates
    Dulmet, B
    PROCEEDINGS OF THE 2001 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION, 2001, : 514 - 519
  • [6] Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials
    Chen, Hengbiao
    Meng, Lili
    Lu, Mengjiao
    Song, Ziwen
    Wang, Wen
    Shao, Xiuting
    MICROMACHINES, 2023, 14 (10)
  • [7] Contributions to the development of an axisymmetric SAW motor with a stator made from non-piezoelectric material
    Guenther, Richard
    Richter, Rene
    Lienig, Jens
    SENSORS AND ACTUATORS A-PHYSICAL, 2019, 295 : 274 - 287
  • [8] Non-Piezoelectric Resonant Acoustic Sensors Electromagnetic Excitation as an Alternative Transducer Principle
    Riesch, Christian
    Reichel, Erwin K.
    Lucklum, Frieder
    Jakoby, Bernhard
    SENSOREN UND MESSSYSTEME 2008, 2008, 2011 : 67 - 76
  • [9] Anomalous increase of SAW velocity due to conducting film on piezoelectric substrate
    Zaitsev, BD
    Kuznetsova, IE
    Joshi, SG
    2000 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2000, : 449 - 452
  • [10] Non-piezoelectric resonant acoustic sensors: Electromagnetic excitation as an alternative transducer principle
    Technische Universität Wien
    不详
    VDI Ber., 2008, 2011 (67-76):
12345