Fabrication of Metallic Nanostructures of Sub-20 nm with an Optimized Process of E-Beam Lithography and Lift-Off

被引：8

作者：

Yue, Weisheng ^{[1
]}

Wang, Zhihong ^{[1
]}

Wang, Xianbin ^{[1
]}

Chen, Longqing ^{[1
]}

Yang, Yang ^{[1
]}

Chew, Basil ^{[1
]}

Syed, Ahad ^{[1
]}

Wong, Kim Chong ^{[1
]}

Zhang, Xixiang ^{[1
]}

机构：

[1] KAUST, Adv Nanofabricat & Imaging Core Lab, Thuwal 239556900, Saudi Arabia

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2012年 / 12卷 / 01期

关键词：

Metallic Nanostructure; E-Beam Lithography; Lift-Off; Surface Enhanced Raman Scattering (SERS); ENHANCED RAMAN-SCATTERING; SPECTROSCOPY; ARRAYS;

D O I：

10.1166/jnn.2012.5382

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed.

引用

页码：696 / 699

页数：4

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