Design of high linearity InGaAs/InP avalanche photodiode with a hybrid absorption layer structure

被引:10
|
作者
Xing, Hailong [1 ]
Zhang, Junqin [1 ]
Liu, Aofei [1 ]
Yang, Yintang [1 ]
机构
[1] Xidian Univ, Sch Microelect, Key Lab, Minist Educ Wide Band Gap Semicond Mat & Devices, Xian 710071, Shaanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
Avalanche diode; InGaAs/InP; Linearity; Hybrid absorption layer; Numerical simulation; DARK-CURRENT; RELIABILITY;
D O I
10.1016/j.infrared.2019.103018
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Based on InGaAs/InP materials, a high linearity avalanche diode with a hybrid absorber layer was designed. The hybrid absorption layer is composed of intrinsic and neutral absorption layers. We analyzed the effect of the thickness ratio of different absorber layers, the doping concentration of the charge layer and the neutral absorber layer on the linearity of APD. The analysis and simulation results show that the hybrid absorption layer APD designed in this paper uses the depletion absorption layer and the neutral absorption layer with a thickness ratio of 0.5. The charge layer and the neutral absorption layer with doping concentrations of 9 x 10(16)/cm(3) and 6 x 10(17)/cm(3), respectively, effectively increase the linearity of the device while maintaining high responsivity. Under this structure, the linearity of the device is greater than - 5.3 dBm with a gain of 11 and the responsivity is about 0.84 A/W at a gain of unity, which is about 50% higher than the normal SAGCM APD of the same responsivity.
引用
收藏
页数:6
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