3D packaging of a microsystem with special thermal constraints

被引:0
|
作者
Morrissey, A [1 ]
Alderman, J [1 ]
Kelly, G [1 ]
Kohári, Z [1 ]
Páhi, A [1 ]
Rencz, M [1 ]
机构
[1] Natl Univ Ireland Univ Coll Cork, Natl Microelect Res Ctr, Cork, Ireland
关键词
D O I
暂无
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
After presenting the challenges and solutions of the 3D packaging of a medical implant MEMS device the paper presents thermal simulations on the structure. Using this simulation problem as a case study various features of the SUNRED and SYSTUS 3D simulators are compared in the paper.
引用
收藏
页码:171 / 174
页数:4
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