A novel fabrication for pressure sensor with polymer material and its characteristic testing

被引：0
|
作者：
Ko, H. S. [2 ]
Liu, C. W. [1 ]
Gau, C. [2 ]
机构：
[1] Natl Nano Device Lab, Tainan Branch, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Inst Aeronaut & Astronaut, Tainan 70101, Taiwan
来源：
2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2007年
关键词：
pressure sensor; SU-8; polymer;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：279 / +
页数：4
相关论文
共 50 条
  • [31] Fabrication and characterisation of a novel biomimetic anisotropic ceramic/polymer-infiltrated composite material
    Al-Jawoosh, Sara
    Ireland, Anthony
    Su, Bo
    DENTAL MATERIALS, 2018, 34 (07) : 994 - 1002
  • [32] 3D-printed Pressure Sensor with Heterogeneous Polymer Material and Annealing Effect
    Kwon, Hyeon Jung
    Lee, Sunkon
    Kim, Joo-Hyung
    NANO-, BIO-, INFO-TECH SENSORS AND WEARABLE SYSTEMS, 2021, 11590
  • [33] POLYMER GAS INTERACTIONS AT HIGH-PRESSURE - THE APPLICATION OF ULTRASONIC TECHNIQUES FOR MATERIAL TESTING
    BRISCOE, BJ
    ZAKARIA, S
    POLYMER TESTING, 1990, 9 (02) : 103 - 118
  • [34] Study of the fabrication of a silicon pressure sensor
    Chang, CC
    Lieu, CT
    Hsich, MK
    INTERNATIONAL JOURNAL OF ELECTRONICS, 1997, 82 (03) : 295 - 302
  • [35] Fabrication of a Flexible Graphene Pressure Sensor
    Jung, Hyojin
    Chun, Sungwoo
    Kim, Youngjun
    Oh, Hyeong Sik
    Bae, Gi Yoon
    Bae, Giyeol
    Park, Wanjun
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2015, 15 (11) : 9020 - 9024
  • [36] Ozone sensor with hsgfet and its characteristic
    Niu, WC
    Jia, YF
    Li, HW
    Na, XB
    Xie, JX
    Zhang, FH
    Luo, WD
    Zhou, YG
    Yu, J
    INTERNATIONAL CONFERENCE ON SENSOR TECHNOLOGY (ISTC 2001), PROCEEDINGS, 2001, 4414 : 204 - 206
  • [37] Design, fabrication and testing of fiber bragg grating based fixed guided beam pressure sensor
    Manuvinakurake, Manjunath
    Gandhi, Uma
    Mangalanathan, Umapathy
    Nayak, Manjunath
    OPTIK, 2018, 158 : 1063 - 1072
  • [38] Temperature characteristic of Platinum Piezoresistive Pressure Sensor
    Du, Lidong
    Xiao, Li
    Zhao, Zhan
    Fang, Zhen
    Xu, Jing
    Zhao, Junjuan
    Xuan, Yundong
    MEMS/NEMS NANO TECHNOLOGY, 2011, 483 : 180 - 184
  • [39] Fabrication of a novel palladium membrane sensor for its determination in environmental and biological samples
    Bahathiq, Adil O. S.
    Babalghith, Ahmad O.
    Amin, Alaa S.
    Askar, Abdelrazek M.
    ENVIRONMENTAL SCIENCE-ADVANCES, 2024, 3 (05): : 776 - 788
  • [40] Fabrication of Conducting Polymer Nanowire Sensor Array
    Choi, WooSeok
    An, Taechang
    Lim, Geunbae
    2009 IEEE SENSORS, VOLS 1-3, 2009, : 1151 - 1153
12345