A novel fabrication for pressure sensor with polymer material and its characteristic testing

被引：0
|
作者：
Ko, H. S. [2 ]
Liu, C. W. [1 ]
Gau, C. [2 ]
机构：
[1] Natl Nano Device Lab, Tainan Branch, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Inst Aeronaut & Astronaut, Tainan 70101, Taiwan
来源：
2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2007年
关键词：
pressure sensor; SU-8; polymer;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：279 / +
页数：4
相关论文
共 50 条
  • [1] Novel fabrication of a pressure sensor with polymer material and evaluation of its performance
    Ko, H. S.
    Liu, C. W.
    Gau, C.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (08) : 1640 - 1648
  • [2] Additive fabrication of pressure sensitive material for flexible pressure sensor and its characteristics
    Park, Chae Young
    Kim, Ho-Chan
    Lee, In Hwan
    SENSORS AND ACTUATORS A-PHYSICAL, 2024, 369
  • [3] Fabrication and testing of polymer cantilevers for VOC sensor
    Shiraishi, N.
    Ikehara, T.
    Sugiyama, S.
    Ando, Y.
    26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, 47 : 378 - 381
  • [4] Fabrication and testing of a Hall effect based pressure sensor
    Paliwal, Sankalp
    Yenuganti, Sujan
    Manuvinakurake, Manjunath
    SENSOR REVIEW, 2022, 42 (03) : 354 - 364
  • [5] Fabrication of a novel vacuum microelectronic pressure sensor
    Wen, ZY
    Wen, ZQ
    Chen, G
    Xu, SL
    JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS, 2004, 3 (04): : 574 - 578
  • [6] Flexible capacitive pressure sensor: material, structure, fabrication and application
    Dong, Caozhen
    Bai, Yuefeng
    Zou, Junfeng
    Cheng, Junkai
    An, Yifei
    Zhang, Zhentao
    Li, Zihao
    Lin, Siyuan
    Zhao, Shihao
    Li, Nan
    NONDESTRUCTIVE TESTING AND EVALUATION, 2024, 39 (07) : 1749 - 1790
  • [7] Piezoresistive characteristics of MWNT nanocomposites and fabrication as a polymer pressure sensor
    Gau, C.
    Ko, H. S.
    Chen, H. T.
    NANOTECHNOLOGY, 2009, 20 (18)
  • [8] Design and fabrication of a novel 3-dimension sensor and its application for implant mechanical testing
    Xue, Ke
    Hua, Zikai
    Zhang, Jianhua
    HDP'07: PROCEEDINGS OF THE 2007 INTERNATIONAL SYMPOSIUM ON HIGH DENSITY PACKAGING AND MICROSYSTEM INTEGRATION, 2007, : 322 - +
  • [9] Fabrication and Testing of an Osmotic Pressure Sensor for Glucose Sensing Application
    Nagesh, Ch
    Paily, Roy P.
    MICROMACHINES, 2014, 5 (03): : 722 - 737
  • [10] Fabrication and testing of a PZT thin film high-pressure sensor
    Zakar, E
    Polcawich, R
    Dubey, M
    Piekarski, B
    McLane, G
    Conrad, J
    Piekarz, R
    Wickenden, D
    Champion, J
    D'Amico, W
    Hollis, MSL
    McMullen, K
    Porter, D
    INTEGRATED FERROELECTRICS, 2001, 41 (1-4) : 1781 - 1788
12345