A novel fabrication for pressure sensor with polymer material and its characteristic testing

被引：0
|
作者：
Ko, H. S. [2 ]
Liu, C. W. [1 ]
Gau, C. [2 ]
机构：
[1] Natl Nano Device Lab, Tainan Branch, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Inst Aeronaut & Astronaut, Tainan 70101, Taiwan
来源：
2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2007年
关键词：
pressure sensor; SU-8; polymer;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：279 / +
页数：4
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