Laboratory-size x-ray microscope using Wolter mirror optics and an electron-impact x-ray source

被引：7

作者：

Ohba, Akira ^{[1
]}

Nakano, Tomoyasu ^{[1
]}

Onoda, Shinobu ^{[1
]}

Mochizuki, Takahiro ^{[1
]}

Nakamoto, Katsuhiro ^{[1
]}

Hotaka, Hisaya ^{[1
]}

机构：

[1] Hamamatsu Photon KK, Hamakita Ku, 5000 Hirakuchi, Hamamatsu, Shizuoka 4348601, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2021年 / 92卷 / 09期

关键词：

TRANSMISSION; TOMOGRAPHY; FIELD; WHOLE;

D O I：

10.1063/5.0059906

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We developed a laboratory-size three-dimensional water-window x-ray microscope using condenser and objective grazing incidence Wolter type I mirrors, an electron-impact-type x-ray source, and a back-illuminated CCD. The imaging system was improved for practical applications in life science research fields. Using a new objective mirror with reduced figure errors, a resolution limit of 3.1 line pairs/mu m was achieved for two-dimensional transmission images and sub-micrometer-scale three-dimensional structures were resolved. Incorporating a cryogenic stage into the x-ray microscope, we observed biological samples embedded in ice to evaluate the usefulness of observation in the water-window region and multi-energy observation was demonstrated using an x-ray source with multiple x-ray tubes. Published under an exclusive license by AIP Publishing.

引用

页数：8

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