Preparation of functionally gradient fluorocarbon polymer films by plasma polymerization of NF3 and propylene

Fluorocarbon polymer films were prepared by plasma polymerization using nitrogen trifluoride (NF3) and propylene as starting materials. To improve their adhesiveness to substrates, a novel functionally gradient film in which the content of fluorine decreased continuously from the surface to the interior was prepared by changing source gas composition during deposition. This film had a smooth and pinhole-free surface, and had a high contact angle (110 degrees) for water drop. In addition, it showed good adhesion to a glass substrate. (C) 1996 John Wiley & Sons, Inc.