Preparation of functionally gradient fluorocarbon polymer films by plasma polymerization of NF3 and propylene

被引:0
|
作者
Tasaka, A
Komura, A
Uchimoto, Y
Inaba, M
Ogumi, Z
机构
[1] KYOTO UNIV,GRAD SCH ENGN,DIV ENERGY & HYDROCARBON CHEM,SAKYO KU,KYOTO 60601,JAPAN
[2] DOSHISHA UNIV,FAC ENGN,DEPT MOLEC SCI & TECHNOL,TANABE,KYOTO 61003,JAPAN
关键词
plasma polymerization; fluorocarbon film; functionally gradient material; propylene; nitrogen trifluoride;
D O I
10.1002/(SICI)1099-0518(19960130)34:2<193::AID-POLA5>3.3.CO;2-T
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Fluorocarbon polymer films were prepared by plasma polymerization using nitrogen trifluoride (NF3) and propylene as starting materials. To improve their adhesiveness to substrates, a novel functionally gradient film in which the content of fluorine decreased continuously from the surface to the interior was prepared by changing source gas composition during deposition. This film had a smooth and pinhole-free surface, and had a high contact angle (110 degrees) for water drop. In addition, it showed good adhesion to a glass substrate. (C) 1996 John Wiley & Sons, Inc.
引用
收藏
页码:193 / 198
页数:6
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