Oxidized Silicon-On-Insulator (OxSOI) from Bulk Silicon: a New Photonic Platform

被引：0
|
作者：
Sherwood-Droz, Nicolas [1 ]
Gondarenko, Alexander [1 ]
Lipson, Michal [1 ]
机构：
[1] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA
来源：
2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS) | 2010年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate a bulk silicon alternative to SOI, using Si(3)N(4) masking and oxidation techniques. We show waveguide losses of 2.92 dB/cm with a process compatible with the front-end of a typical CMOS fabrication line. (C)2010 Optical Society of America
引用
收藏
页数：2
相关论文
共 50 条
  • [21] Fabrication of high-Q multimode microring resonators on a photonic silicon-on-insulator platform
    Catuneanu, Mircea-Traian
    Echresh, Ahmad
    Li, Rang
    Shaik, Saif Mohd
    Fang, Shiyao
    Umeshaiah, Bhavana Siddaveeranna
    Georgiev, Yordan
    Berencen, Yonder
    Erbe, Artur
    Zhou, Shengqiang
    Helm, Manfred
    Jamshidi, Kambiz
    INTEGRATED PHOTONICS PLATFORMS III, 2024, 13012
  • [22] Thermooptic tuning of silicon-on-insulator photonic crystal microcavity
    Chong, HMH
    De La Rue, RM
    PHOTONIC CRYSTAL MATERIALS AND NANOSTRUCTURES, 2004, 5450 : 318 - 322
  • [23] In-plane photonic transduction of silicon-on-insulator microcantilevers
    Noh, Jong Wook
    Anderson, Ryan
    Kim, Seunghyun
    Cardenas, Jaime
    Nordin, Gregory P.
    OPTICS EXPRESS, 2008, 16 (16) : 12114 - 12123
  • [24] Optical spectroscopy of silicon-on-insulator waveguide photonic crystals
    Belotti, M
    Galli, M
    Bajoni, D
    Guizzetti, G
    Gerace, D
    Agio, M
    Andreani, LC
    Lalanne, P
    Chen, Y
    NANOPHOTONICS, NANOSTRUCTURE, AND NANOMETROLOGY, 2005, 5635 : 116 - +
  • [25] Photonic molecules for application in silicon-on-insulator optical sensors
    Barea, Luis A. M.
    Souza, Mario C. M. M.
    Moras, Andre L.
    Catellan, Alvaro R. G.
    Cirino, Giuseppe A.
    Von Zuben, Antonio A. G.
    Bassani, Jose W. M.
    Frateschi, Newton C.
    SILICON PHOTONICS XIII, 2018, 10537
  • [26] Characterization of a photonic strain sensor in silicon-on-insulator technology
    Westerveld, Wouter J.
    Pozo, Jose
    Harmsma, Peter J.
    Schmits, Ruud
    Tabak, Erik
    van den Dool, Teun C.
    Leinders, Suzanne M.
    van Dongen, Koen W. A.
    Urbach, H. Paul
    Yousefi, Mirvais
    OPTICS LETTERS, 2012, 37 (04) : 479 - 481
  • [27] Silicon-on-Insulator Microring Resonators for Photonic Biosensing Applications
    Werquin, Sam
    Goes, Arne
    Dubruel, Peter
    Bienstman, Peter
    2013 15TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS (ICTON 2013), 2013,
  • [28] Basic structures for photonic integrated circuits in silicon-on-insulator
    Bogaerts, W
    Taillaert, D
    Luyssaert, B
    Dumon, P
    Van Campenhout, J
    Bienstman, P
    Van Thourhout, D
    Baets, R
    Wiaux, V
    Beckx, S
    OPTICS EXPRESS, 2004, 12 (08): : 1583 - 1591
  • [29] Optical spectroscopy of silicon-on-insulator waveguide photonic crystals
    Bajoni, D
    Galli, M
    Belotti, M
    Paleari, F
    Patrini, M
    Guizzetti, G
    Gerace, D
    Agio, M
    Andreani, LC
    Chen, Y
    NEW MATERIALS FOR MICROPHOTONICS, 2004, 817 : 89 - 94
  • [30] All-silicon photonic crystal photoconductor on silicon-on-insulator at telecom wavelength
    Haret, Laurent-Daniel
    Checoury, Xavier
    Han, Zheng
    Boucaud, Philippe
    Combrie, Sylvain
    De Rossi, Alfredo
    OPTICS EXPRESS, 2010, 18 (23): : 23965 - 23972
12345